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Collisionless heating in radio-frequency discharges: a review

Turner, Miles M. (2009) Collisionless heating in radio-frequency discharges: a review. Journal of Physics D: Applied Physics, 42 (19). ISSN 1361-6463

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Abstract

Radio-frequency discharges are practically and scientifically interesting. A practical understanding of such discharges requires, among other things, a quantitative appreciation of the mechanisms involved in heating electrons, since this heating is the proximate cause of the ionization that sustains the plasma. When these discharges are operated at sufficiently low pressure, collisionless electron heating can be an important and even the dominant mechanism. Since the low pressure regime is important for many applications, understanding collisionless heating is both theoretically and practically important. This review is concerned with the state of theoretical knowledge of collisionless heating in both inductive and capacitive discharges.

Item Type:Article (Published)
Refereed:Yes
Subjects:Physical Sciences > Physics
DCU Faculties and Centres:Research Initiatives and Centres > National Centre for Plasma Science and Technology (NCPST)
DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences
Publisher:Institute of Physics
Official URL:http://dx.doi.org/10.1088/0022-3727/42/19/194008
Copyright Information:© 2009 IOP Publishing Ltd
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
Funders:Science Foundation Ireland
ID Code:14889
Deposited On:24 Sep 2009 10:08 by Miles Turner. Last Modified 24 Sep 2009 10:08

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