Collisionless heating in radio-frequency discharges: a review
Turner, Miles M. (2009) Collisionless heating in radio-frequency discharges: a review. Journal of Physics D: Applied Physics, 42 (19). ISSN 1361-6463
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Radio-frequency discharges are practically and scientifically interesting. A practical understanding of such discharges requires, among other things, a quantitative appreciation of the mechanisms involved in heating electrons, since this heating is the proximate
cause of the ionization that sustains the plasma. When these discharges are operated at sufficiently low pressure, collisionless electron heating can be an important and even the dominant mechanism. Since the low pressure regime is important for many applications, understanding collisionless heating is both theoretically and
practically important. This review is concerned with the state of theoretical knowledge of collisionless heating in both inductive and capacitive discharges.
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