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A preparative technique for spiral thin-film transformer at GHz frequency band

Zheng, Liang and Qin, Huibin and Daniels, Stephen (2009) A preparative technique for spiral thin-film transformer at GHz frequency band. In: PRIME 2009 - 5th International Conference on Ph.D. Research in Microelectronics & Electronics, 12-17 July 2009, Cork, Ireland. ISBN 978-1-4244-3733-7

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Abstract

This paper present a preparative technique for spiral thin-film transformer with ferrite magnetic core. RF magnetron sputtering is used to prepare ferrite thin film on SiO2 layer. Compatible problems of thin film with IC technology are observed by SEM. The problems are resolved through sputtering parameters modification and heating treatment addition. S-parameters are measured at 10 MHz-20 GHz. The result shows that The experience result shows, magnetic core thin-film transformer with 15:15 ratio-turn can obtain the maximal transmission efficiency 80.9% at 10 MHz-20 GHz, and the air core transformer can obtain the maximal transmission efficiency 55.4% at same frequency range. Ferrite thin film can improve the transmission efficiency evidently.

Item Type:Conference or Workshop Item (Paper)
Event Type:Conference
Refereed:Yes
Uncontrolled Keywords:S-parameters; UHF devices; VHF devices; ferrite devices; high-frequency transformers; magnetic microwave devices; magnetic thin film devices; silicon compounds; sputtering; transformer cores;
Subjects:Physical Sciences > Thin films
Engineering > Microelectronics
Engineering > Electronics
DCU Faculties and Centres:Research Initiatives and Centres > National Centre for Plasma Science and Technology (NCPST)
Published in:Proceedings of the 5th International Conference on Ph.D. Research in Microelectronics & Electronics. . Institute of Electrical and Electronics Engineers. ISBN 978-1-4244-3733-7
Publisher:Institute of Electrical and Electronics Engineers
Official URL:http://dx.doi.org/10.1109/RME.2009.5201354
Copyright Information:©2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
ID Code:15568
Deposited On:27 Jul 2010 11:38 by DORAS Administrator. Last Modified 27 Jul 2010 11:38

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