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Plasma modeling for a nonsymmetric capacitive discharge driven by a nonsinusoidal radio frequency current

Dewan, Nasim Ahmed and McNally, Patrick J. and Herbert, P.A.F. (2002) Plasma modeling for a nonsymmetric capacitive discharge driven by a nonsinusoidal radio frequency current. Journal of Applied Physics, 91 (9). ISSN 0021-8979

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An analytical solution for the sheath dynamics of an asymmetrically driven capacitively coupled plasma is obtained under the assumptions of time-independent, collisionless ion motion, inertialess electrons, and uniform current density. Modeling is performed considering that the plasma is driven by a nonsinusoidal radio frequency (rf) current which can be resolved into a finite number of harmonic components. Together with different sheath parameters the equation for the bulk plasma impedance is also obtained to calculate the overall plasma impedance and the overall rf voltage. Assuming equal plate areas the solution for a symmetric discharge is also obtainable from this model. We have found that the even harmonic components of rf voltage and impedance are always present, even in a symmetric discharge. Experimental results are shown to be in qualitative agreement with the theoretical model. The values of normalized rf voltage and impedance harmonics assume lower values as the asymmetry of the plasma chamber decreases.

Item Type:Article (Published)
Subjects:Engineering > Electronics
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Engineering and Computing > School of Electronic Engineering
Research Initiatives and Centres > Research Institute for Networks and Communications Engineering (RINCE)
Publisher:American Institute of Physics
Official URL:
Copyright Information:©2002 American Institute of Physics.
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
ID Code:199
Deposited On:06 Feb 2008 by DORAS Administrator. Last Modified 23 Nov 2017 15:35

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