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On the use of total reflection x-ray topography for the observation of misfit dislocation strain at the surface of a Si/Ge–Si heterostructure

McNally, Patrick J. and Dilliway, G. and Bonar, J.M. and Willoughby, A. and Tuomi, T. and Rantamäki, R. and Danilewsky, A.N. and Lowney, Donnacha (2000) On the use of total reflection x-ray topography for the observation of misfit dislocation strain at the surface of a Si/Ge–Si heterostructure. Applied Physics Letters, 77 (11). ISSN 0003-6951

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Abstract

Synchrotron x-ray topography was used in total reflection topography (TRT) mode to observe strain-induced surface bumps due to the presence of underlying misfit dislocations in strained-layer SiGe on Si epitaxial heterostructures. In these experiments, the x rays approached the sample surfaces at grazing incident angles below the critical angles for total external reflection for a number of reflections, and hence, surface strain features nominally less than a few tens of angstrøms from the sample surface have been observed. These are similar to the surface bumpiness observed by atomic force microscopy, albeit on a much larger lateral length scale. The fact that TRT mode images were taken was confirmed by the observation of conventional backreflection topographic images of misfit dislocations in all samples when the grazing incidence angle became greater than the critical angle.

Item Type:Article (Published)
Refereed:Yes
Subjects:Engineering > Electronics
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Engineering and Computing > School of Electronic Engineering
Research Initiatives and Centres > Research Institute for Networks and Communications Engineering (RINCE)
Publisher:American Institute of Physics
Official URL:http://dx.doi.org/10.1063/1.1308269
Copyright Information:©2000 American Institute of Physics.
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
ID Code:200
Deposited On:06 Feb 2008 by DORAS Administrator. Last Modified 02 Feb 2009 14:42

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