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Electron heating mode transitions in dual frequency capacitive discharges

Turner, Miles M. and Chabert, P. (2006) Electron heating mode transitions in dual frequency capacitive discharges. Applied Physics Letters, 89 (23). ISSN 0003-6951

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Abstract

The authors consider electron heating in the sheath regions of capacitive discharges excited by a combination of two frequencies, one much higher than the other. There is a common supposition that in such discharges the higher frequency is the dominant source of electron heating. In this letter, the authors discuss closed analytic expressions quantifying the Ohmic and collisionless electron heating in a dual frequency discharge. In both cases, the authors show that the lower frequency parameters strongly influence the heating effect. Moreover, this influence is parametrically different, so that the dominant heating mechanism may be changed by varying the low frequency current density.

Item Type:Article (Published)
Refereed:Yes
Uncontrolled Keywords:high-frequency discharges; plasma sheaths; plasma ohmic heating; plasma transport processes;
Subjects:Physical Sciences > Physics
DCU Faculties and Centres:Research Initiatives and Centres > National Centre for Plasma Science and Technology (NCPST)
DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences
Publisher:American Institute of Physics
Official URL:http://dx.doi.org/10.1063/1.2402226
Copyright Information:©2006 American Institute of Physics
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
ID Code:213
Deposited On:04 Mar 2008 by DORAS Administrator. Last Modified 02 Feb 2009 15:07

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