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Electron heating mechanisms in dual frequency capacitive discharges

Turner, Miles M. and Chabert, P. (2007) Electron heating mechanisms in dual frequency capacitive discharges. Plasma Sources Science and Technology, 16 (2). pp. 364-371. ISSN 0963-0252

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Abstract

We discuss electron heating mechanisms in the sheath regions of dual-frequency capacitive discharges, with the twin aims of identifying the dominant mechanisms and supplying closed-form expressions from which the heating power can be estimated. We show that the heating effect produced by either Ohmic or collisionless heating is much larger when the discharge is excited by a superposition of currents at two frequencies than if either current had acted alone. This coupling effect occurs because the lower frequency current, while not directly heating the electrons to any great extent, strongly affects the spatial structure of the discharge in the sheath regions.

Item Type:Article (Published)
Refereed:Yes
Subjects:Physical Sciences > Physics
DCU Faculties and Centres:Research Initiatives and Centres > National Centre for Plasma Science and Technology (NCPST)
DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences
Publisher:Institute Of Physics
Official URL:http://dx.doi.org/10.1088/0963-0252/16/2/020
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
ID Code:216
Deposited On:04 Mar 2008 by DORAS Administrator. Last Modified 02 Feb 2009 15:55

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