Cannon, Paul, McGlynn, Enda ORCID: 0000-0002-3412-9035, O'Neill, Darragh, Darcy, Conor, Rouse, Erin, O'Connor, Robert
ORCID: 0000-0001-5794-6188, Freeland, Brian
ORCID: 0000-0003-3705-5745, O'Connell, Barry and Gaughran, Jennifer
ORCID: 0000-0002-3659-036X
(2024)
Deposition of high-quality, nanoscale SiO2 films and 3D structures.
Applied Materials Today, 38
.
102175-1-102175-11.
ISSN 2352-9415