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Allen, David, Wittge, Jochen, Zlotos, A., Gorogostegui-Coinas, E., Garagorri, J., McNally, Patrick J. orcid logoORCID: 0000-0003-2798-5121, Danilewsky, Andreas N. and Elizalde, M.R. (2010) Observation of nano-indent induced strain fields and dislocation generation in silicon wafers using micro-raman spectroscopy and white beam x-ray topography. Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, 268 (3-4). pp. 383-387. ISSN 0168-583x

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