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Author: Ellingboe, Albert

Number of items: 2.

2012

Ellingboe, Albert (2012) High-VHF Capacitive-Coupled-Plasma Technology, with Scaling to 450mm. In: SEMICON Korea, 2012, 7-9 Feb 2012, Seoul, South Korea.

2011

Milosavljevic, Vladimir and Ellingboe, Albert and Daniels, Stephen (2011) Influence of plasma chemistry on oxygen triplets. European Physical Journal D. Atomic, Molecular, Optical and Plasma Physics. . ISSN 1434-6060 (In Press)

This list was generated on Fri Nov 24 03:15:54 2017 GMT.