Browse DORAS
Browse Theses
Latest Additions
Creative Commons License
Except where otherwise noted, content on this site is licensed for use under a:

Author: Ellingboe, Albert

Number of items: 2.


Ellingboe, Albert (2012) High-VHF Capacitive-Coupled-Plasma Technology, with Scaling to 450mm. In: SEMICON Korea, 2012, 7-9 Feb 2012, Seoul, South Korea.


Milosavljevic, Vladimir and Ellingboe, Albert and Daniels, Stephen (2011) Influence of plasma chemistry on oxygen triplets. European Physical Journal D. Atomic, Molecular, Optical and Plasma Physics. . ISSN 1434-6060 (In Press)

This list was generated on Sun Jun 17 06:16:36 2018 IST.