Joshi, Rajesh (2010) Characterisation of the impact of scattered light and power illumination nonuniformity on semiconductor processes. Master of Engineering thesis, Dublin City University.
Metadata
| Item Type: | Thesis (Master of Engineering) |
|---|---|
| Date of Award: | 1 July 2010 |
| Refereed: | No |
| Supervisor(s): | Daniels, Stephen |
| Subjects: | Engineering > Microelectronics |
| DCU Faculties and Centres: | UNSPECIFIED |
| Use License: | This item is licensed under a Creative Commons Attribution-NonCommercial-No Derivative Works 3.0 License. View License |
| ID Code: | 15672 |
| Deposited On: | 04 Apr 2011 15:48 by Stephen Daniels . Last Modified 19 Jul 2018 14:51 |
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