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Abstract

The use of plasma as an industrial tool has become the norm within the surface treatment industry. However, our understanding of the plasma surface interactions is still within the R&D phase. What can be done experimentally is limited due to the electromagnetic properties of plasma and the intrusive nature of the methods available for experimentalists. Incorporating complex boundaries (reactor walls/treated surfaces/external circuitry) in computerized simulation is a sought after goal in the battle of understanding industrial plasma peculiarities . A flexible-easily configurable- modus operandi has been devised to implement the effects of complex boundaries within the vicinity of an electromagnetically active system. The technique is based on the spatial conversion of the system into dynamic electromagnetically time-variable elements, then using circuit/Maxwellian approach to obtain and analyze time snapshots of the spatial voltage distribution across the system. The technique has been benchmarked using simplified case studies/models that can be theoretically analyzed, and has been found to be both robust and reliable. We used this technique to analyze a plasma system within the vicinity of complex boundaries. The plasma it self has been implemented within the simulation using two different theoretical approaches, further demonstrating the flexibility of the technique. The end result of this study yield in two folds: the potential distribution along adjustable boundary layers, with a special interest in what is commonly known as a triple junction configuration. And the impact of the used plasma model on the results. We conclude with a discussion of the results, and future planned work.

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• A technique for implementing complex boundary configurations in industrial plasma modelling and simulation. (deposited 13 May 2011 11:53) [Currently Displayed]