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Number of items: 2.
2012
Ellingboe, Albert 
ORCID: 0000-0002-3997-0392
(2012)
High-VHF Capacitive-Coupled-Plasma Technology, with Scaling to 450mm.
In: SEMICON Korea, 2012, 7-9 Feb 2012, Seoul, South Korea.
2011
Milosavljevic, Vladimir, Ellingboe, Albert ORCID: 0000-0002-3997-0392 and Daniels, Stephen
(2011)
Influence of plasma chemistry on oxygen triplets.
European Physical Journal D. Atomic, Molecular, Optical and Plasma Physics.
(64).
pp. 437-445.
ISSN 1434-6060
(In Press)