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Ducrée, Jens ORCID: 0000-0002-0366-1897, Gruhler, Holger, Hey, Nicolaus, Müller, Martin., Bekesi, Stefan, Freygang, Michae, Sandmaiser, Hermann and Zengerle, Roland (2000) TOPSPOT - a new method for the fabrication of microarrays. In: MEMS 2000 - 13th IEEE Annual International Conference on Micro Electro Mechanical Systems, 23-27 January 2000, Miyazaki , Japan. ISBN 0-7803-5273-4