Cherkaoui, K., Monaghan, S., Negara, M.A., Modreanu, M., Hurley, Paul K. ORCID: 0000-0001-5137-721X, O'Connell, Deborah, McDonnell, Stephen, Hughes, Greg ORCID: 0000-0003-1310-8961, Wright, S., Barklie, R.C., Bailey, P. and Noakes, T.C.Q. (2008) Electrical, structural, and chemical properties of HfO₂ films formed by electron beam evaporation. Journal of Applied Physics, 104 (6). 064113-1. ISSN 0021-8979