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Cannon, Paul, McGlynn, Enda orcid logoORCID: 0000-0002-3412-9035, O'Neill, Darragh, Darcy, Conor, Rouse, Erin, O'Connor, Robert orcid logoORCID: 0000-0001-5794-6188, Freeland, Brian orcid logoORCID: 0000-0003-3705-5745, O'Connell, Barry and Gaughran, Jennifer orcid logoORCID: 0000-0002-3659-036X (2024) Deposition of high-quality, nanoscale SiO2 films and 3D structures. Applied Materials Today, 38 . 102175-1-102175-11. ISSN 2352-9415

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