Babu Janarathanaram, Sharath Kumar ORCID: 0000-0001-7513-1249, Kelly, Sean
ORCID: 0000-0002-8782-9633, Kechkar, Samir, Swift, Paul, Daniels, Stephen and Turner, Miles M
ORCID: 0000-0001-9713-6198
(2018)
Experimental investigation of electron heating modes in capacitively coupled radio-frequency oxygen discharge.
Plasma Sources Science and Technology, 28
(11).
pp. 1-14.
ISSN 1361-6595