The aim of this investigation was the deposition of hard» wear resistant titanium nitride (TiN) thin films, produced from a reactive magnetron sputter ion plating device, at high deposition rates and low substrate temperatures. An allied objective vas the understanding and development of experimental methods which would permit the deposition of titanium nitride-type layers on plastic. The early part of the work deals with the formation of TiN layers on high speed steel, at 500°C deposition temperature Modifications in equipment design and deposition procedures aided the formation of adherent TiN layers. The routine deposition of stoichiometric titanium nitride vas facilitated by a control feedback network The use of graded interfaces between the film and the substrate improved adhesion. Total gas pressure and the level of substrate bias affect film hardness and wear resistance. The next stage of the development process vas the deposition of TiN at approximately 250°C substrate temperature. The main source of substrate heating, in the case of an indirectly cooled magnetron, was identified as the heat liberated from the target. The use of a directly cooled magnetron configuration resulted in lover substrate temperatures. With this device, TiN films vere formed on high speed steel at high deposition rates and with good adhesion. The increased ion current to the substrate is, tentatively, attributed to an extended plasma region associated with the directly cooled configuration Metastable T^N phases are formed from the combination of high deposition rates, low substrate temperatures (250°C) and increased ion bombardment to the substrate. These TiN films, however, are softer and less wear resistant than those produced at 500°C. The final part of the investigation centred around the deposition of TiN type layers onto plastic T1 -T1 N and AI-T1 -T1N layered structures were deposited onto polycarbonate plastic at 100°C. An experimental design approach was employed to develop adhering coatings. A slight partial pressure of oxygen during the initial Ti deposition improves film adhesion. The use of the aluminium interface improves film reflectivity, cosmetic appearance and adhesion. This aluminium interface makes the multilayer structure more susceptible to physical and chemical attack. The wear resistance of the coated plastic is 2 to 4 times greater than the base plastic material.