Flynn, Shauna (2018) Plasma-based surface Nanopatterning of semiconductor materials using block copolymer lithography. PhD thesis, Dublin City University.
Abstract
This project focuses on utilising block copolymers (BCPs) to fabricate silicon
nanopillar arrays. The rationale for this was to use these silicon nanopillar substrates
as a master to fabricate polymer nanopillars through replica molding techniques for
applications in antibacterial surfaces. In the process, we aim to investigate reactive ion
etch plasmas to modify polymer brush layers and to selectively remove polymer
material from the surface.
The development of a highly-controlled annealing process for polystyrene – block –
poly4vinylpyridine (PS – b – P4VP) using a custom built solvothermal annealing
chamber was undertaken. This work eradicated the disadvantages associated with
static annealing methods and allowed the fabrication of BCP templates with hexagonal
ordering. The removal of P4VP cores using plasma was investigated. In this work,
oxygen, argon and nitrogen plasmas were investigated. A key finding was that
nitrogen plasmas were successful in removing P4VP over PS, with further etch
investigations into P2VP leading to the hypothesis that the nitrogen in the aromatic
ring of P4VP plays a vital role in the etch rate. Preliminary results for the modification
of a preferential PS brush layer to a neutral brush layer to control BCP orientation
have been presented. This work showed that the wettability and surface energy of the
brush layer was modified when exposed to an oxygen plasma. BCP annealing on top
of plasma modified brush layers provided and insight into how the addition of oxygen
effects BCP orientation.
Replica molding methods were optimised using nanostructured cicada wings. This
enabled polymer nanopillars surfaces to be fabricated. The swelling properties of these
materials were investigated with the results revealing that the polymer swelling caused
the nanopillar structure to increase in size. The fabrication of silicon nanopillar arrays
using BCP templates of been demonstrated. These templates were transferred into the
silicon substrate by converting the BCP into a hard mask and performing a silicon
etch. Using optimised molding methods, polymer nanopillar surfaces were fabricated.
These polymer surfaces were tested for antibacterial activity. Results showed
nanostructured surfaces with pillars greater than ~50nm in height exhibited a greater
antibacterial effect when compared to unpatterned surfaces and nanostructured
surfaces with pillars less than 50nm.
Metadata
Item Type: | Thesis (PhD) |
---|---|
Date of Award: | January 2018 |
Refereed: | No |
Supervisor(s): | Kelleher, Susan and Daniels, Stephen |
Uncontrolled Keywords: | plasma copolymer |
Subjects: | Engineering > Electronic engineering |
DCU Faculties and Centres: | DCU Faculties and Schools > Faculty of Engineering and Computing > School of Electronic Engineering Research Institutes and Centres > Biomedical Diagnostics Institute (BDI) |
Use License: | This item is licensed under a Creative Commons Attribution-NonCommercial-No Derivative Works 3.0 License. View License |
Funders: | Irish Research Council for Science Engineering and Technology |
ID Code: | 22188 |
Deposited On: | 06 Apr 2018 11:17 by Stephen Daniels . Last Modified 10 Jan 2022 04:30 |
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