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Number of items: 1.
2021
Harvey, Cleo ORCID: 0000-0002-3752-4225
(2021)
Plasma dynamics of Very-High-Frequency (VHF) discharges with application to Atomic-Layer-Etching (ALE).
PhD thesis, Dublin City University.
This list was generated on Mon Dec 9 00:03:25 2024 UTC.