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Effect of laser processing parameters and glass type on topology of micro-channels

Ben Azouz, Aymen and Karazi, Shadi and Brabazon, Dermot and Vázquez, Mercedes and Macka, Mirek and Paull, Brett (2010) Effect of laser processing parameters and glass type on topology of micro-channels. In: Microtech 2010 Conference & Expo, 21-24 June 2010, Anaheim, CA, USA.

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Traditional processes to manufacture micro-fluidic devices include standard lithography, electron beam writing and photo-patterning. These techniques are well established but most are limited to surface micro-fabrication. Laser micro-machining provides an alternative for microfabrication of devices. This paper presents Design of Experiment models for the fabrication of micro-channel structures with four different types of glass, soda-lime, fused-silica, borosilicate and quartz. A 1.5kW CO2 laser with 90 μm spot size was used to fabricate micro-channels on the surface of glass sheets. Power, P, pulse repetition frequency, PRF, and translation speed, U, were set as control parameters. The resulting geometry of the channel (depth and width) and transmission capabilities were measured and analyzed. A comparison of the results of this experimental testing with the four glass types showed that quartz and fused-silica glasses would have better channel topologies for chemical sensing applications.

Item Type:Conference or Workshop Item (Paper)
Event Type:Conference
Uncontrolled Keywords:pulsed CO2 laser; micro-fluidics; micro-channel; glass; optical transmission;
Subjects:Physical Sciences > Lasers
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Engineering and Computing > School of Mechanical and Manufacturing Engineering
Research Initiatives and Centres > National Centre for Sensor Research (NCSR)
Published in:Nanotech 2010 Proceedings, Vol. 2, pp. 496-499. 2.
Official URL:
Copyright Information:Copyright 2010 NSTI Reprinted and revised, with permission, from the Nanotech 2010 Proceedings, Vol. 2, pp. 496-499, June 2010, Anaheim, California, U.S.A.
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
ID Code:15444
Deposited On:08 Jul 2010 14:20 by DORAS Administrator. Last Modified 14 Oct 2016 10:09

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