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Reusable modelling and simulation of flexible manufacturing for next generation semiconductor manufacturing facilities

El-Kilany, Khaled S. (2003) Reusable modelling and simulation of flexible manufacturing for next generation semiconductor manufacturing facilities. PhD thesis, Dublin City University.

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Abstract

Automated material handling systems (AMHS) in 300 mm semiconductor manufacturing facilities may need to evolve faster than expected considering the high performance demands on these facilities. Reusable simulation models are needed to cope with the demands of this dynamic environment and to deliver answers to the industry much faster. One vision for intrabay AMHS is to link a small group of intrabay AMHS systems, within a full manufacturing facility, together using what is called a Merge/Diverge link. This promises better operational performance of the AMHS when compared to operating two dedicated AMHS systems, one for interbay transport and the other for intrabay handling. A generic tool for modelling and simulation of an intrabay AMHS (GTIA-M&S) is built, which utilises a library of different blocks representing the different components of any intrabay material handling system. GTIA-M&S provides a means for rapid building and analysis of an intrabay AMHS under different operating conditions. The ease of use of the tool means that inexpert users have the ability to generate good models. Models developed by the tool can be executed with the merge/diverge capability enabled or disabled to provide comparable solutions to production demands and to compare these two different configurations of intrabay AMHS using a single simulation model. Finally, results from simulation experiments on a model developed using the tool were very informative in that they include useful decision making data, which can now be used to further enhance and update the design and operational characteristics of the intrabay AMHS.

Item Type:Thesis (PhD)
Date of Award:2003
Refereed:No
Supervisor(s):El Baradie, M.A. and Young, Paul and Hashmi, Saleem
Uncontrolled Keywords:semiconductor manufacturing; material handling; material transport; automation
Subjects:Engineering > Mechanical engineering
Engineering > Production engineering
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Engineering and Computing > School of Mechanical and Manufacturing Engineering
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-No Derivative Works 3.0 License. View License
ID Code:17333
Deposited On:29 Aug 2012 15:42 by Fran Callaghan. Last Modified 29 Aug 2012 15:42

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