Abstract

Self-consistent particle-in-cell simulations are carried out to investigate the effect of discharge voltage, driving frequency and extent of electrode gap on the formation of electric field transients. The shape of the electron energy distribution function (EEDF) into the bulk plasma and the nature of the mode transition in plasma den- sity is presented for driving frequency range from 27.12 MHz to 80 MHz. The present results, taken in conjunction with our previous study1 [Physics of plasmas 23, 110701 (2016)] that only looked at the driving frequency dependence in collisionless capaci- tive Ar discharges, provide a comprehensive and detailed account of the dynamics of such discharges over a multi-parameter operational space.