Sharma, Sarveshwar ORCID: 0000-0002-0642-0247, Sirse, Nishant
ORCID: 0000-0002-7063-4100, Kaw, P. K., Turner, Miles M.
ORCID: 0000-0001-9713-6198 and Ellingboe, Albert R.
ORCID: 0000-0002-3997-0392
(2016)
Effect of driving frequency on the electron energy distribution function and
electron-sheath interaction in a low pressure capacitively coupled plasmas.
Physics of Plasmas, 23
(11).
ISSN 1089-7674
Sharma, Sarveshwar ORCID: 0000-0002-0642-0247, Mishra, S. K., Kaw, P. K. and Turner, Miles M.
ORCID: 0000-0001-9713-6198
(2016)
The effect of intermediate frequency on sheath dynamics in collisionless current
driven triple frequency capacitive plasmas.
Physics of Plasmas, 24
(1).
ISSN 1070-664X