The effect of intermediate frequency on sheath dynamics in collisionless current
driven triple frequency capacitive plasmas
Sharma, SarveshwarORCID: 0000-0002-0642-0247, Mishra, S. K., Kaw, P. K. and Turner, Miles M.ORCID: 0000-0001-9713-6198
(2016)
The effect of intermediate frequency on sheath dynamics in collisionless current
driven triple frequency capacitive plasmas.
Physics of Plasmas, 24
(1).
ISSN 1070-664X
The CCP (Capacitively Coupled Plasma) discharge featuring operation in current driven triple
frequency configuration has analytically been investigated and the outcome is verified by utilising
1D3V particle-in-cell (PIC) simulation code. In this analysis the role of middle frequency component
of the applied signal has precisely been explored. The discharge parameters are seen to be sensitive to
the ratio of the chosen middle frequency to lower and higher frequencies for fixed amplitudes of the
three frequency components. On the basis of analysis and PIC simulation results, the middle frequency
component is demonstrated to act as additional control over sheath potential, electron sheath heating
and ion energy distribution function (iedf) of the plasma discharge. For the electron sheath heating,
effect of the middle frequency is seen to be pronounced as it approaches to the lower frequency
component. On the other hand for the iedf, the control is more sensitive as the middle frequency
approaches towards higher frequency. The PIC estimate for the electron sheath heating is found to be
in reasonably good agreement with the analytical prediction based on Kaganovich formulation.
This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
Funders:
Department of Science and Technology (DST), Government of India via Projects GITA/DST/TWN/P-56/2014, DST-JC Bose Fellowship, and YOS Professor PKK 92-14.
ID Code:
27108
Deposited On:
09 May 2022 14:16 by
Miles Turner
. Last Modified 09 May 2022 14:16