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Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasmas

Sharma, Sarveshwar ORCID: 0000-0002-0642-0247, Sirse, Nishant ORCID: 0000-0002-7063-4100, Kaw, P. K., Turner, Miles M. ORCID: 0000-0001-9713-6198 and Ellingboe, Albert R. ORCID: 0000-0002-3997-0392 (2016) Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasmas. Physics of Plasmas, 23 (11). ISSN 1089-7674

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Abstract

By using a self-consistent particle-in-cell simulation we investigated the effect of driving frequency (27.12–70 MHz) on the electron energy distribution function (EEDF) and electron-sheath interaction in a low pressure (5 mTorr) capacitively coupled Ar discharge for a fixed discharge voltage. We observed a mode transition with driving frequency, changing the shape of EEDF from a strongly bi-Maxwellian at a driving frequency of 27.12 MHz, to a convex type distribution at an intermediate frequency, 50 MHz, and finally becomes a weak bi-Maxwellian at a higher driving frequency i.e. above 50 MHz. The transition is caused by the electric field transients which is of the order of electron plasma frequency caused by the energetic ‘beams’ of electrons ejected from near the sheath edge. Below the transition frequency, 50 MHz, these high energy electrons redistributes their energy with low energy electrons thereby increasing the effective electron temperature in the plasma, whereas, the plasma density remains nearly-constant. Above the transition frequency high-energy electrons are confined between opposite sheaths which increases the ionization probability and therefore the plasma density increases drastically.

Item Type:Article (Published)
Refereed:Yes
Additional Information:Article number: 110701
Subjects:Physical Sciences > Plasmas
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences
Research Initiatives and Centres > National Centre for Plasma Science and Technology (NCPST)
Publisher:American Institute of Physics
Official URL:https://dx.doi.org/10.1063/1.4967356
Copyright Information:© 2016 Authors.
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
Funders:Science Foundation Ireland
ID Code:27107
Deposited On:09 May 2022 13:25 by Miles Turner . Last Modified 05 Oct 2022 15:37

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