Turner, Miles M. ORCID: 0000-0001-9713-6198 (2009) Collisionless heating in radio-frequency discharges: a review. Journal of Physics D: Applied Physics, 42 (19). ISSN 1361-6463
Abstract
Radio-frequency discharges are practically and scientifically interesting. A practical understanding of such discharges requires, among other things, a quantitative appreciation of the mechanisms involved in heating electrons, since this heating is the proximate
cause of the ionization that sustains the plasma. When these discharges are operated at sufficiently low pressure, collisionless electron heating can be an important and even the dominant mechanism. Since the low pressure regime is important for many applications, understanding collisionless heating is both theoretically and
practically important. This review is concerned with the state of theoretical knowledge of collisionless heating in both inductive and capacitive discharges.
Metadata
Item Type: | Article (Published) |
---|---|
Refereed: | Yes |
Subjects: | Physical Sciences > Physics |
DCU Faculties and Centres: | Research Institutes and Centres > National Centre for Plasma Science and Technology (NCPST) DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences |
Publisher: | Institute of Physics |
Official URL: | http://dx.doi.org/10.1088/0022-3727/42/19/194008 |
Copyright Information: | © 2009 IOP Publishing Ltd |
Use License: | This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License |
Funders: | Science Foundation Ireland |
ID Code: | 14889 |
Deposited On: | 24 Sep 2009 09:08 by Miles Turner . Last Modified 24 Jan 2019 11:19 |
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