Effect of laser processing parameters and glass type on topology of micro-channels
Ben Azouz, Aymen, Karazi, ShadiORCID: 0000-0002-8887-0873, Brabazon, DermotORCID: 0000-0003-3214-6381, Vázquez, MercedesORCID: 0000-0002-9770-5562, Macka, Mirek and Paull, Brett
(2010)
Effect of laser processing parameters and glass type on topology of micro-channels.
In: Microtech 2010 Conference & Expo, 21-24 June 2010, Anaheim, CA, USA.
Traditional processes to manufacture micro-fluidic
devices include standard lithography, electron beam writing
and photo-patterning. These techniques are well established
but most are limited to surface micro-fabrication. Laser
micro-machining provides an alternative for microfabrication
of devices. This paper presents Design of
Experiment models for the fabrication of micro-channel
structures with four different types of glass, soda-lime,
fused-silica, borosilicate and quartz. A 1.5kW CO2 laser
with 90 μm spot size was used to fabricate micro-channels
on the surface of glass sheets. Power, P, pulse repetition
frequency, PRF, and translation speed, U, were set as
control parameters. The resulting geometry of the channel
(depth and width) and transmission capabilities were
measured and analyzed. A comparison of the results of this
experimental testing with the four glass types showed that
quartz and fused-silica glasses would have better channel
topologies for chemical sensing applications.
Item Type:
Conference or Workshop Item (Paper)
Event Type:
Conference
Refereed:
Yes
Uncontrolled Keywords:
pulsed CO2 laser; micro-fluidics; micro-channel;
glass; optical transmission;
Copyright 2010 NSTI http://nsti.org. Reprinted and revised, with permission, from the Nanotech 2010 Proceedings, Vol. 2, pp. 496-499, June 2010, Anaheim, California, U.S.A.
Use License:
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ID Code:
15444
Deposited On:
08 Jul 2010 13:20 by
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. Last Modified 20 Sep 2018 13:21