Skip to main content
DORAS
DCU Online Research Access Service
Login (DCU Staff Only)
An experimental study of low pressure parallel plate radio frequency discharges

Doyle, Ruth Ann (1994) An experimental study of low pressure parallel plate radio frequency discharges. PhD thesis, Dublin City University.

Full text available as:

[img]
Preview
PDF - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader
2MB

Abstract

Radio frequency generated plasmas are used extensively in commercial manufacturing systems for a range of different applications including reactive ion etching, thin film deposition and surface modification. To optimise such processes a thorough understanding of the physical processes within the plasma is essential. In this thesis low pressure radio frequency argon plasmas are investigated in order to understand further the physics of their behaviour under certain conditions. Tuned Langmuir probes and microwave mterferometry are used as diagnostics methods to measure different plasma parameters as a function of gas pressure, current density and applied voltage. The spatial variations of these parameters are examined within the bulk plasma. In particular the electron distribution function was obtained from the Langmuir probe to observe transitions between heating modes which occur under certain conditions of the plasma. To further understand this transition a small variable transverse magnetic field was applied to the plasma to confine the electrons and modify their trajectories Mathematical models devised and compared to the experimental results showed an excellent agreement. Finally the tuned probe was installed on other research systems in Ireland and abroad to characterise the plasma produced by different gases, with other methods of power coupling and in various chamber geometries.

Item Type:Thesis (PhD)
Date of Award:1994
Refereed:No
Supervisor(s):Hopkins, Michael B.
Uncontrolled Keywords:Plasma engineering
Subjects:Physical Sciences > Plasmas
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-No Derivative Works 3.0 License. View License
ID Code:18545
Deposited On:24 Jul 2013 13:23 by Celine Campbell . Last Modified 20 Apr 2017 11:18

Downloads

Downloads per month over past year

Archive Staff Only: edit this record

Altmetric
- Altmetric
+ Altmetric
  • Student Email
  • Staff Email
  • Student Apps
  • Staff Apps
  • Loop
  • Disclaimer
  • Privacy
  • Contact Us