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Hard X-ray photoelectron spectroscopy study of copper formation by metal salt inclusion in a polymer film

Snelgrove, Matthew orcid logoORCID: 0000-0003-0344-1146, Mani-González, Pierre Giovanni orcid logoORCID: 0000-0001-6993-2349, Bogan, Justin, Lundy, Ross orcid logoORCID: 0000-0002-1329-8614, Rueff, Jean-Pascal orcid logoORCID: 0000-0003-3594-918X, Hughes, Greg orcid logoORCID: 0000-0003-1310-8961, Yadav, Pravind orcid logoORCID: 0000-0002-2535-7132, McGlynn, Enda orcid logoORCID: 0000-0002-3412-9035, Morris, Michael A. and O'Connor, Robert orcid logoORCID: 0000-0001-5794-6188 (2019) Hard X-ray photoelectron spectroscopy study of copper formation by metal salt inclusion in a polymer film. Journal of Physics D: Applied Physics, 52 (43). ISSN 0022-3727

Abstract
In this work we present the results of a Hard X-ray Photoelectron Spectroscopy (HAXPES) study on the creation of metallic copper layers via metal-salt infiltration into a poly-2-vinylpyridine (P2VP) film. Metal salt inclusion is a wet chemistry process which allows for the fabrication of both metal and metal oxide films by means of infiltrating a receptive polymer thin film with metal salt precursors. A copper infiltrated P2VP film was subject to UV/Ozone treatment to form copper oxide and annealed in-vacuo to reduce the film to metallic copper. HAXPES and transmission electron microscope (TEM) measurements were used to study the polymer film before and after metal salt infiltration, along with analysis of the copper oxide created after UV/Ozone treatment. The results show successful infiltration of the metal salt into the polymer film, as well as complete conversion to copper oxide following UV/Ozone treatment and reduction to metallic copper with a subsequent in-situ anneal, which demonstrates the ability of the technique for the creation of several key integrated circuit features.
Metadata
Item Type:Article (Published)
Refereed:Yes
Uncontrolled Keywords:Copper, Metal Salt Inclusion; Polymer Infiltration; Area Selective Deposition; P2VP; Metal Salt; HAXPES
Subjects:Engineering > Materials
Physical Sciences > Nanotechnology
Physical Sciences > Spectrum analysis
Physical Sciences > Thin films
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences
Research Institutes and Centres > National Centre for Plasma Science and Technology (NCPST)
Publisher:Institute of Physics Publishing
Official URL:http://dx.doi.org/10.1088/1361-6463/ab35b2
Copyright Information:© 2019 Institute of Physics
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
Funders:Science Foundation Ireland (grants 12/RC/2278 and 16/SP/3809), SOLEIL Synchrotron (SOLEIL proposal number 20180106), CONACyT (2018-000007-01EXTV-00235)
ID Code:23648
Deposited On:19 Aug 2019 12:10 by Enda Mcglynn . Last Modified 28 Nov 2023 12:15
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