Sharma, Sarveshwar ORCID: 0000-0002-0642-0247, Sirse, Nishant ORCID: 0000-0002-7063-4100, Kuley, Animesh ORCID: 0000-0003-2325-6597 and Turner, Miles M. ORCID: 0000-0001-9713-6198 (2020) Electric field non-linearity in very high frequency capacitive discharges at constant electron plasma frequency. Plasma Sources Science and Technology, 29 (4). ISSN 0963-0252
Abstract
A self-consistent particle-in-cell simulation study is performed to investigate the effect of
driving frequency on the electric field non-linearity, electron heating mechanism, and
electron energy distribution function (EEDF) in a low pressure symmetric capacitively
coupled plasma (CCP) discharge at a constant electron plasma frequency maintained by
adjusting the discharge voltage. The driving frequency is varied from 27.12 MHz to 100 MHz
for a fixed discharge gap of 3.2 cm and at a gas pressure of 1 Pa. The simulation results
provide insight into higher harmonic generations in a CCP system for a constant electron
response time. The spatio-temporal evolution and spatial time-averaged electron heating are
presented for different driving frequencies. The simulation results predict that the electric
field non-linearity increases with a rise in driving frequency along with a concurrent increase
in higher harmonic contents. In addition to the electron heating and cooling near to the sheath
edge, a positive <J.E> is observed in to the bulk plasma at higher driving frequencies. The
EEDF illustrates enhancement in the population of mid-energy range electrons as driving
frequency increases thereby changing the shape of EEDF from bi-Maxwellian to nearly
Maxwellian. For the constant ion flux on the electrode surface, a decrease in the ion energy
by more than half is observed with an increase in driving frequency.
Metadata
Item Type: | Article (Published) |
---|---|
Refereed: | Yes |
Additional Information: | Article number: 045003 |
Subjects: | Physical Sciences > Plasmas |
DCU Faculties and Centres: | DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences Research Institutes and Centres > National Centre for Plasma Science and Technology (NCPST) |
Publisher: | Institute of Physics |
Official URL: | https://dx.doi.org/10.1088/1361-6595/ab74b5 |
Copyright Information: | © 2020 IOP Publishing Ltd |
Use License: | This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License |
Funders: | Board of Research in Nuclear Sciences (BRNS Sanctioned No. 39/14/05/2018-BRNS), Science and Engineering Research Board EMEQ program (SERB Sanctioned No. EEQ/2017/000164), Infosys Foundation Young Investigator grant. |
ID Code: | 27105 |
Deposited On: | 09 May 2022 14:06 by Miles Turner . Last Modified 09 May 2022 15:39 |
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