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Electric field non-linearity in very high frequency capacitive discharges at constant electron plasma frequency

Sharma, Sarveshwar orcid logoORCID: 0000-0002-0642-0247, Sirse, Nishant orcid logoORCID: 0000-0002-7063-4100, Kuley, Animesh orcid logoORCID: 0000-0003-2325-6597 and Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 (2020) Electric field non-linearity in very high frequency capacitive discharges at constant electron plasma frequency. Plasma Sources Science and Technology, 29 (4). ISSN 0963-0252

Abstract
A self-consistent particle-in-cell simulation study is performed to investigate the effect of driving frequency on the electric field non-linearity, electron heating mechanism, and electron energy distribution function (EEDF) in a low pressure symmetric capacitively coupled plasma (CCP) discharge at a constant electron plasma frequency maintained by adjusting the discharge voltage. The driving frequency is varied from 27.12 MHz to 100 MHz for a fixed discharge gap of 3.2 cm and at a gas pressure of 1 Pa. The simulation results provide insight into higher harmonic generations in a CCP system for a constant electron response time. The spatio-temporal evolution and spatial time-averaged electron heating are presented for different driving frequencies. The simulation results predict that the electric field non-linearity increases with a rise in driving frequency along with a concurrent increase in higher harmonic contents. In addition to the electron heating and cooling near to the sheath edge, a positive <J.E> is observed in to the bulk plasma at higher driving frequencies. The EEDF illustrates enhancement in the population of mid-energy range electrons as driving frequency increases thereby changing the shape of EEDF from bi-Maxwellian to nearly Maxwellian. For the constant ion flux on the electrode surface, a decrease in the ion energy by more than half is observed with an increase in driving frequency.
Metadata
Item Type:Article (Published)
Refereed:Yes
Additional Information:Article number: 045003
Subjects:Physical Sciences > Plasmas
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences
Research Institutes and Centres > National Centre for Plasma Science and Technology (NCPST)
Publisher:Institute of Physics
Official URL:https://dx.doi.org/10.1088/1361-6595/ab74b5
Copyright Information:© 2020 IOP Publishing Ltd
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
Funders:Board of Research in Nuclear Sciences (BRNS Sanctioned No. 39/14/05/2018-BRNS), Science and Engineering Research Board EMEQ program (SERB Sanctioned No. EEQ/2017/000164), Infosys Foundation Young Investigator grant.
ID Code:27105
Deposited On:09 May 2022 14:06 by Miles Turner . Last Modified 09 May 2022 15:39
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