Sharma, Sarveshwar ORCID: 0000-0002-0642-0247, Sirse, Nishant ORCID: 0000-0002-7063-4100, Turner, Miles M. ORCID: 0000-0001-9713-6198 and Ellingboe, Albert R. ORCID: 0000-0002-3997-0392 (2018) Influence of driving frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge. Physics of Plasmas, 25 (6). ISSN 2331-8422
Abstract
One-dimensional particle-in-cell simulation is used to simulate the capacitively coupled argon
plasma for a range of driving frequency from 13.56 MHz to 100 MHz. The argon chemistry set
can, selectively, include two metastable levels enabling multi-step ionization and metastable
pooling. The results show that the plasma density decreases when metastable atoms are
included with higher discrepancy at higher excitation frequency. The contribution of multistep
ionization to overall density increases with excitation frequency. The electron temperature
increases with the inclusion of metastable atoms and decreases with excitation frequency. At
lower excitation frequency, the density of Ar** (3p5 4p, 13.1 eV) is higher than Ar* (3p5 4s, 11.6
eV), whereas, at higher excitation frequencies the Ar* (3p5 4s, 11.6 eV) is the dominant
metastable atom. The metastable and electron temperature profile evolve from a parabolic
profile at lower excitation frequency to a saddle type profile at higher excitation frequency.
With metastable, the electron energy distribution function (EEDF) changes its shape from
Druyvesteyn type, at low excitation frequency, to bi-Maxwellian, at high frequency plasma
excitation, however a three-temperature EEDF is observed without metastable atoms.
Metadata
Item Type: | Article (Published) |
---|---|
Refereed: | Yes |
Additional Information: | Article number: 063501 |
Subjects: | Physical Sciences > Plasmas |
DCU Faculties and Centres: | DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences Research Institutes and Centres > National Centre for Plasma Science and Technology (NCPST) |
Publisher: | American Institute of Physics |
Official URL: | https://dx.doi.org/10.1063/1.5031221 |
Copyright Information: | © 2018 AIP Publishing |
Use License: | This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License |
Funders: | Korea Institute for the Advancement of Technology and Ministry of Knowledge Economy (No. L-2010-1438-000),, Enterprise Ireland CF 20144043, co-funded by the European Regional Development Fund (EDRF) under the National Strategic Reference Framework (NSRF) 2007-2013 |
ID Code: | 27109 |
Deposited On: | 09 May 2022 15:44 by Miles Turner . Last Modified 09 May 2022 15:44 |
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