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Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge

Sharma, Sarveshwar ORCID: 0000-0002-0642-0247, Sen, Abhijit, Sirse, Nishant ORCID: 0000-0002-7063-4100, Turner, Miles M. ORCID: 0000-0001-9713-6198 and Ellingboe, Albert R. ORCID: 0000-0002-3997-0392 (2018) Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge. Physics of Plasmas, 25 (8). ISSN 1070-664X

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Abstract

The dynamical characteristics of a single frequency low pressure capacitively coupled plasma (CCP) device under varying applied RF voltages and driving frequencies are studied using particle-in-cell/Monte Carlo collision simulations. An operational regime is identified where for a given voltage the plasma density is found to remain constant over a range of driving frequencies and to then increase rapidly as a function of the driving frequency. The threshold frequency for this mode transition as well as the value of the constant density is found to increase with an increase in the applied voltage. Over the constant density range, for a given voltage, the sheath width is seen to increase as a function of the increasing driving frequency, thereby changing the ion energy without affecting the ion density. Our parametric study thus indicates that the twin knobs of the applied voltage and driving frequency offer a means of independently controlling the density and the ion energy in a low pressure CCP device that may be usefully exploited for plasma processing applications.

Item Type:Article (Published)
Refereed:Yes
Additional Information:Article number: 080705
Subjects:Physical Sciences > Plasmas
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences
Research Initiatives and Centres > National Centre for Plasma Science and Technology (NCPST)
Publisher:American Institute of Physics
Official URL:https://dx.doi.org/10.1063/1.5045816
Copyright Information:© 2018 Authors.
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
Funders:Science Foundation Ireland
ID Code:27110
Deposited On:09 May 2022 15:54 by Miles Turner . Last Modified 05 Oct 2022 15:37

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