Sharma, Sarveshwar ORCID: 0000-0002-0642-0247, Sirse, Nishant ORCID: 0000-0002-7063-4100, Sen, Abhijit, Turner, Miles M. ORCID: 0000-0001-9713-6198 and Ellingboe, Albert R. ORCID: 0000-0002-3997-0392 (2019) Influence of select discharge parameters on electric field transients triggered in collisionless very high frequency capacitive discharges. Physics of Plasmas, 26 (10). ISSN 1070-664X
Abstract
Self-consistent particle-in-cell simulations are carried out to investigate the effect of
discharge voltage, driving frequency and extent of electrode gap on the formation
of electric field transients. The shape of the electron energy distribution function
(EEDF) into the bulk plasma and the nature of the mode transition in plasma den-
sity is presented for driving frequency range from 27.12 MHz to 80 MHz. The present
results, taken in conjunction with our previous study1 [Physics of plasmas 23, 110701
(2016)] that only looked at the driving frequency dependence in collisionless capaci-
tive Ar discharges, provide a comprehensive and detailed account of the dynamics of
such discharges over a multi-parameter operational space.
Metadata
Item Type: | Article (Published) |
---|---|
Refereed: | Yes |
Additional Information: | Article number: 103508 |
Uncontrolled Keywords: | collisionless; capacitive discharges; very high frequency; electric field transients; particle-in-cel |
Subjects: | Physical Sciences > Plasmas |
DCU Faculties and Centres: | DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences Research Institutes and Centres > National Centre for Plasma Science and Technology (NCPST) |
Publisher: | American Institute of Physics |
Official URL: | https://dx.doi.org/10.1063/1.5122837 |
Copyright Information: | © 2019 American Institute of Physics |
Use License: | This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License |
Funders: | Science Foundation Ireland |
ID Code: | 27111 |
Deposited On: | 10 May 2022 09:48 by Miles Turner . Last Modified 10 May 2022 09:48 |
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