Sharma, Sarveshwar ORCID: 0000-0002-0642-0247, Sirse, Nishant ORCID: 0000-0002-7063-4100 and Turner, Miles M. ORCID: 0000-0001-9713-6198 (2020) High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform. Plasma Sources Science and Technology, 29 (11). ISSN 0963-0252
Abstract
A particle-in-cell (PIC) simulation study is performed to investigate the discharge
asymmetry, higher harmonic generations and electron heating mechanism in a low
pressure capacitively coupled plasma (CCP) excited by a saw-tooth like current
waveform for different driving frequencies; 13.56 MHz, 27.12 MHz, and 54.24 MHz.
Two current densities, 50 A/m2 and 100 A/m2 are chosen for a constant gas pressure
of 5 mTorr in argon plasma. At a lower driving frequency, high frequency
modulations on the instantaneous sheath electric field near to the grounded electrode
are observed. These high frequency oscillations create multiple ionization beam like
structures near to the sheath edge that drives the plasma density in the discharge and
responsible for discharge/ionization asymmetry at lower driving frequency.
Conversely, the electrode voltage shows higher harmonics generation at higher
driving frequencies and corresponding electric field transients are observed into the
bulk plasma. At lower driving frequency, the electron heating is maximum near to the
sheath edge followed by electron cooling within plasma bulk, however, alternate
heating and cooling i.e. burst like structures are obtained at higher driving
frequencies. These results suggest that electron heating in these discharges will not be
described accurately by simple analytical models.
Metadata
Item Type: | Article (Published) |
---|---|
Refereed: | Yes |
Additional Information: | Article number: 114001 |
Subjects: | Physical Sciences > Plasmas |
DCU Faculties and Centres: | DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences Research Institutes and Centres > National Centre for Plasma Science and Technology (NCPST) |
Publisher: | Institute of Physics |
Official URL: | https://doi.org/10.1088/1361-6595/abbac2 |
Copyright Information: | © 2020 IOP Publishing Ltd |
Use License: | This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License |
Funders: | Science Foundation Ireland |
ID Code: | 27112 |
Deposited On: | 10 May 2022 11:36 by Miles Turner . Last Modified 10 May 2022 11:36 |
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