Sharma, Sarveshwar ORCID: 0000-0002-0642-0247, Sirse, Nishant ORCID: 0000-0002-7063-4100, Sen, Abhijit, Wu, J. S. and Turner, Miles M. ORCID: 0000-0001-9713-6198 (2019) Electric field filamentation and higher harmonic generation in a very high frequency capacitive discharges. Journal of Physics D: Applied Physics, 52 (36). ISSN 0022-3727
Abstract
The effects of the discharge voltage on the formation and nature of electric
field transients in a symmetric, collisionless, very high frequency, capacitively coupled
plasma are studied using a self-consistent particle-in-cell (PIC) simulation code. At a
driving frequency of 60 MHz and 5 mTorr of argon gas pressure, the discharge voltage
is varied from 10 V to 150 V for a fixed discharge gap. It is observed that an increase in
the discharge voltage causes filamentation in the electric field transients and to create
multiple higher harmonics in the bulk plasma. Correspondingly, higher harmonics, up
to 7th harmonic, in the discharge current are also observed. The power in the higher
harmonics increases with a rise in the discharge voltage. The plasma density continues
to increase with the discharge voltage but in a non-linear manner, whereas, the bulk
electron temperature decreases. Meanwhile, the electron energy distribution function
(EEDF) evolves from a Maxwellian at lower discharge voltages to a bi-Maxwellian at
higher discharge voltages
Metadata
Item Type: | Article (Published) |
---|---|
Refereed: | Yes |
Additional Information: | Article number: 365201 |
Uncontrolled Keywords: | capacitively coupled plasmas; electric field transients; stochastic heating; particle-in-cell simulation |
Subjects: | Physical Sciences > Plasmas |
DCU Faculties and Centres: | DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences |
Publisher: | Institute of Physics |
Official URL: | https://dx.doi.org/10.1088/1361-6463/ab2959 |
Copyright Information: | © 2019 IOP Publishing Ltd |
Use License: | This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License |
Funders: | Science Foundation Ireland |
ID Code: | 27113 |
Deposited On: | 10 May 2022 10:50 by Miles Turner . Last Modified 10 May 2022 10:50 |
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