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Electric field filamentation and higher harmonic generation in a very high frequency capacitive discharges

Sharma, Sarveshwar orcid logoORCID: 0000-0002-0642-0247, Sirse, Nishant orcid logoORCID: 0000-0002-7063-4100, Sen, Abhijit, Wu, J. S. and Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 (2019) Electric field filamentation and higher harmonic generation in a very high frequency capacitive discharges. Journal of Physics D: Applied Physics, 52 (36). ISSN 0022-3727

The effects of the discharge voltage on the formation and nature of electric field transients in a symmetric, collisionless, very high frequency, capacitively coupled plasma are studied using a self-consistent particle-in-cell (PIC) simulation code. At a driving frequency of 60 MHz and 5 mTorr of argon gas pressure, the discharge voltage is varied from 10 V to 150 V for a fixed discharge gap. It is observed that an increase in the discharge voltage causes filamentation in the electric field transients and to create multiple higher harmonics in the bulk plasma. Correspondingly, higher harmonics, up to 7th harmonic, in the discharge current are also observed. The power in the higher harmonics increases with a rise in the discharge voltage. The plasma density continues to increase with the discharge voltage but in a non-linear manner, whereas, the bulk electron temperature decreases. Meanwhile, the electron energy distribution function (EEDF) evolves from a Maxwellian at lower discharge voltages to a bi-Maxwellian at higher discharge voltages
Item Type:Article (Published)
Additional Information:Article number: 365201
Uncontrolled Keywords:capacitively coupled plasmas; electric field transients; stochastic heating; particle-in-cell simulation
Subjects:Physical Sciences > Plasmas
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences
Publisher:Institute of Physics
Official URL:https://dx.doi.org/10.1088/1361-6463/ab2959
Copyright Information:© 2019 IOP Publishing Ltd
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
Funders:Science Foundation Ireland
ID Code:27113
Deposited On:10 May 2022 10:50 by Miles Turner . Last Modified 10 May 2022 10:50

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