McFeely, Caitlin ORCID: 0000-0002-0447-8250, Snelgrove, Matthew ORCID: 0000-0003-0344-1146, Shiel, Kyle, Hughes, Greg ORCID: 0000-0003-1310-8961, Yadav, Pravind ORCID: 0000-0002-7267-9142, Lundy, Ross ORCID: 0000-0002-1329-8614, Morris, Michael A. ORCID: 0000-0001-8756-4068, McGlynn, Enda ORCID: 0000-0002-3412-9035 and O'Connor, Robert ORCID: 0000-0001-5794-6188 (2022) Rapid area deactivation for blocking atomic layer deposition processes using polystyrene brush layers. Journal of Materials Chemistry C, 10 . pp. 7476-7484. ISSN 2050-7526
Item Type: | Article (Published) |
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Refereed: | Yes |
Uncontrolled Keywords: | Polymer; Brush; Layer |
Subjects: | Physical Sciences > Chemistry Physical Sciences > Nanotechnology Physical Sciences > Semiconductors Physical Sciences > Spectrum analysis |
DCU Faculties and Centres: | DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences Research Institutes and Centres > National Centre for Plasma Science and Technology (NCPST) |
Publisher: | Royal Society of Chemistry |
Official URL: | https://dx.doi.org/10.1039/d2tc00577h |
Copyright Information: | © 2021 The Authors. |
Use License: | This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License |
Funders: | Science Foundation Ireland (SFI) under Grant Nos. 12/RC/2278 and 16/SP/3809 |
ID Code: | 27244 |
Deposited On: | 23 May 2022 09:17 by Enda Mcglynn . Last Modified 28 Nov 2023 12:04 |
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