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Experimental investigation of electron heating modes in capacitively coupled radio-frequency oxygen discharge

Babu Janarathanaram, Sharath Kumar orcid logoORCID: 0000-0001-7513-1249, Kelly, Sean orcid logoORCID: 0000-0002-8782-9633, Kechkar, Samir, Swift, Paul, Daniels, Stephen and Turner, Miles M orcid logoORCID: 0000-0001-9713-6198 (2018) Experimental investigation of electron heating modes in capacitively coupled radio-frequency oxygen discharge. Plasma Sources Science and Technology, 28 (11). pp. 1-14. ISSN 1361-6595

Abstract
A Langmuir probe has been used to investigate electron heating mechanisms in a capacitively coupled oxygen discharge over a wide pressure range (50 – 800 mTorr) at a fixed applied power (200 W). Evidence presented here from experimentally obtained electron energy distribution functions (EEDFs) illustrates discharge transition from collisionless (stochastic) to collisional (ohmic) dominant regime with increasing oxygen pressure. The discharge exhibited a bi-Maxwellian EEDF in the collisionless regime, dominated by stochastic heating whereas Druyvesteyn-like EEDFs in the collisional dominant regime. Moreover, in the transition between these two regimes, parameters such as electron density, effective electron temperature and electron-neutral collision frequency exhibited significant variations.
Metadata
Item Type:Article (Published)
Refereed:Yes
Uncontrolled Keywords:capacitively coupled plasmas, oxygen discharge, Langmuir probe, electron energy distribution function, electron heating
Subjects:Physical Sciences > Plasma processing
Physical Sciences > Plasmas
DCU Faculties and Centres:UNSPECIFIED
Publisher:Institute of Physics Publishing Ltd.
Official URL:https://iopscience.iop.org/article/10.1088/1361-65...
Funders:Science Foundation Ireland under Grant No. 08/SCR/I1411, Irish Research Council, Intel Ireland
ID Code:29997
Deposited On:17 May 2024 14:16 by Miles Turner . Last Modified 17 May 2024 14:16
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