Login (DCU Staff Only)
Login (DCU Staff Only)

DORAS | DCU Research Repository

Explore open access research and scholarly works from DCU

Advanced Search

Items where Subject is "Plasma processing"

[Atom feed] Atom [RSS feed] RSS 1.0 [RSS2 feed] RSS 2.0
Group by: Item Type | Creators Name | No Grouping
Number of items at this level: 47.

Article

Sharma, Sarveshwar, Sirse, Nishant, Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 and Kuley, Animesh (2023) A harmonic study of electric field nonlinearity and field reversal in collisionless capacitive discharges driven by sawtooth-like waveforms. Physics Letters A, 498 . p. 129346.

Samimi, Mahdieh, Hosseinlaghab, Hassan, McCarthy, Éanna and McNally, Patrick J. orcid logoORCID: 0000-0003-2798-5121 (2022) Multi-messenger radio frequency and optical diagnostics of pulsed laser ablation processes. Journal of Manufacturing and Materials Processing, 6 (106). ISSN 2504-4494

Sharma, Sarveshwar orcid logoORCID: 0000-0002-0642-0247, Sirse, Nishant orcid logoORCID: 0000-0002-7063-4100, Kuley, Animesh orcid logoORCID: 0000-0003-2325-6597 and Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 (2021) Plasma asymmetry and electron and ion energy distribution function in capacitive discharges excited by tailored waveforms. Journal of Physics D: Applied Physics, 55 (27). pp. 1-24. ISSN 1361-6463

Lundy, Ross orcid logoORCID: 0000-0002-1329-8614, Yadav, Pravind orcid logoORCID: 0000-0002-2535-7132, Prochukhan, Nadezda orcid logoORCID: 0000-0002-2535-7132, Giraud, Elsa C. orcid logoORCID: 0000-0002-8556-570X, O'Mahony, Tom F., Selkirk, Andrew orcid logoORCID: 0000-0002-1845-7100, Mullen, Eleanor, Conway, Jim orcid logoORCID: 0000-0003-4282-2240, Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198, Daniels, Stephen orcid logoORCID: 0000-0002-5987-9924, Mani-González, Pierre Giovanni orcid logoORCID: 0000-0001-6993-2349, Snelgrove, Matthew orcid logoORCID: 0000-0003-0344-1146, Bogan, Justin, McFeely, Caitlin orcid logoORCID: 0000-0002-0447-8250, O'Connor, Robert orcid logoORCID: 0000-0001-5794-6188, McGlynn, Enda orcid logoORCID: 0000-0002-3412-9035, Hughes, Greg orcid logoORCID: 0000-0003-1310-8961, Cummins, Cian orcid logoORCID: 0000-0001-6338-3991 and Morris, Michael A. orcid logoORCID: 0000-0001-8756-4068 (2020) Precise definition of a ‘monolayer point’ in polymer brush films for fabricating highly coherent TiO2 thin films by vapor phase Infiltration. Langmuir, 36 (41). pp. 12394-12402. ISSN 0002-7863

Babu Janarathanaram, Sharath Kumar orcid logoORCID: 0000-0001-7513-1249, Kelly, Sean orcid logoORCID: 0000-0002-8782-9633, Kechkar, Samir, Swift, Paul, Daniels, Stephen and Turner, Miles M orcid logoORCID: 0000-0001-9713-6198 (2018) Experimental investigation of electron heating modes in capacitively coupled radio-frequency oxygen discharge. Plasma Sources Science and Technology, 28 (11). pp. 1-14. ISSN 1361-6595

Kelly, Seán orcid logoORCID: 0000-0002-8782-9633 and McNally, Patrick J. orcid logoORCID: 0000-0003-2798-5121 (2017) Remote sensing of a low pressure plasma in the radio near field. Applied Physics Express, 10 (9). 096101. ISSN 1882-0778

Chabert, Pascal and Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 (2017) A model for tailored-waveform radiofrequency sheaths. Journal of Physics D: Applied Physics, 50 (23). 23LT02. ISSN 0022-3727

Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 (2016) Uncertainty and sensitivity analysis in complex plasma chemistry models. Plasmas Source Science and Technology, 25 (1). 015003-015003. ISSN 1361-6595

Eltayeb, Asmaa, Vijayaraghavan, Rajani K. orcid logoORCID: 0000-0003-1096-448X, McCoy, Anthony, Cullen, Joseph, McGlynn, Enda orcid logoORCID: 0000-0002-3412-9035 and Daniels, Stephen (2016) Control of crystal structure, morphology and optical properties of ceria films by post deposition annealing treatments. Thin Solid Films, 603 . pp. 363-370. ISSN 0040-6090

Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 (2015) Uncertainty and error in complex plasma chemistry models. Plasma Sources Science and Technology, 24 (3). 035027. ISSN 1361-6595

Kelly, Seán orcid logoORCID: 0000-0002-8782-9633 and Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 (2013) Atomic oxygen patterning from a biomedical needle-plasma source. Journal of Applied Physics, 114 (12). p. 123301. ISSN 0021-8979

Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 (2013) Numerical effects on energy distribution functions in particle-in-cell simulations with Monte Carlo collisions: choosing numerical parameters. Plasma Sources Science and Technology, 22 (5). 055001-055002. ISSN 1361-6595

Conway, Jim orcid logoORCID: 0000-0003-4282-2240, Kechkar, Samir, O'Connor, Niall, Gaman, Cezar, Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 and Daniels, Stephen (2013) Use of particle-in-cell simulations to improve the actinometry technique for determination of absolute atomic oxygen density. Plasma Sources Science and Technology, 22 (4). 045004-045004. ISSN 0963-0252

Sharma, Sarveshwar and Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 (2012) Simulation study of stochastic heating in single-frequency capacitively coupled discharges with critical evaluation of analytical models. Plasma Sources Science and Technology, 22 . pp. 1-10. ISSN 1361-6595

Thesis

Samimi, Mahdieh (2024) Non-invasive techniques for in situ morphological evaluation of laser-metal interaction. PhD thesis, Dublin City University.

McFeely, Caitlin orcid logoORCID: 0000-0002-0447-8250 (2023) Fabrication and characterisation of polymer brushes for the use in area selective deposition. PhD thesis, Dublin City University.

Bosschaert, Joachim orcid logoORCID: 0000-0002-1060-8285 (2023) Investigation of a differentially powered multi-tile VHF CCP using particle in cell simulation. Master of Science thesis, Dublin City University.

Snelgrove, Matthew orcid logoORCID: 0000-0003-0344-1146 (2022) Characterising infiltration techniques in polymer area selective deposition. PhD thesis, Dublin City University.

Free, Louis orcid logoORCID: 0000-0001-8971-6627 (2022) Reactive oxygen and nitrogen species detection produced by an atmospheric pressure plasma jet. PhD thesis, Dublin City University.

Coates, David (2021) Multivariable process diagnostics for plasma systems. Master of Engineering thesis, Dublin City University.

Harvey, Cleo orcid logoORCID: 0000-0002-3752-4225 (2021) Plasma dynamics of Very-High-Frequency (VHF) discharges with application to Atomic-Layer-Etching (ALE). PhD thesis, Dublin City University.

Alshaltami, Khaled (2020) Experimental investigation of SF6–O2 plasma for the advancement of the anisotropic Si etch process. PhD thesis, Dublin City University.

Sharma, Shailesh (2016) Electrical plasma diagnostics for the measurement of ion related parameters at the substrate surface. PhD thesis, Dublin City University.

Asmaa, Eltayeb (2016) Fabrication, characterisation and analysis of ceria thin films and patterned nanostructered deposits for enhanced solar-driven thermochemical conversion. PhD thesis, Dublin City University.

Monaghan, Ruairi (2015) Development of biofunctional and biocompatible surfaces for biodiagnostic applications utilising plasma enhanced chemical vapour deposition. PhD thesis, Dublin City University.

Su, Zhenning (2015) Modelling of low-pressure discharges for plasma processing. PhD thesis, Dublin City University.

Mac Gearailt, Niall (2015) Process diagnostics of industrial plasma systems. PhD thesis, Dublin City University.

Kechkar, Samir (2015) Experimental investigation of a low pressure capacitively-coupled discharge. PhD thesis, Dublin City University.

Kelly, Seán orcid logoORCID: 0000-0002-8782-9633 (2014) Generation and control of reactive species in low temperature atmospheric pressure plasma sources. PhD thesis, Dublin City University.

Monaghan, Eamonn (2014) VHF-PECVD and analysis of thin nano-crystalline silicon films with a multi-tile plasma source for solar energy applications. PhD thesis, Dublin City University.

Sharma, Sarveshwar (2013) Investigation of Ion and Electron Kinetic Phenomena in Capacitively Coupled Radio-Frequency Plasma Sheaths: A Simulation Study. PhD thesis, Dublin City University.

Sirse, Nishant (2013) Resonance hairpin probe for electronegative plasma diagnostics. PhD thesis, Dublin City University.

Coyle, Conor (2012) Investigation of plasma processes in surface Modification with biodiagnostic applications. PhD thesis, Dublin City University.

Ryan, Kevin (2012) Spatial diagnostics of plasma produced by a VHF multi-tile electrode. Master of Science thesis, Dublin City University.

Singh Gogna, Gurusharan (2012) Study of resonance hairpin probe for electron density measurements in low temperature plasmas. PhD thesis, Dublin City University.

Stopford, Jennifer (2012) Stresses and strain in silicon: 3-dimensional analytical capabilities for the non-invasive evaluation of strain fields in Si wafers and packaged chips. PhD thesis, Dublin City University.

Gaman, Cezar (2011) Mass-spectroscopy and modeling of capacitive coupled hydrogen plasmas. PhD thesis, Dublin City University.

Abu Shamaleh, Taghreed (2010) A technique for implementing complex boundary configurations in industrial plasma modelling and simulation. Master of Science thesis, Dublin City University.

Iqbal, Muhammad Munawar orcid logoORCID: 0000-0002-8579-4828 (2010) Computational investigations of atmospheric pressure discharges. PhD thesis, Dublin City University.

Sheerin, Peter E. (2009) Development of planar langmuir probes for supersonic plasma flows. PhD thesis, Dublin City University.

Hayden, Chanel (2009) Investigation of ion mass diagnostics for plasma processing. PhD thesis, Dublin City University.

Linnane, Shane (2007) Development of an uncompensated diagnostic for the measurement of phase-resolved characteristics in radio-frequency plasmas. PhD thesis, Dublin City University.

Yeates, Patrick orcid logoORCID: 0000-0002-6734-0590 (2004) A spectroscopic and diagnostic study of laser plasma generation and evolution under multi-variable target conditioning. PhD thesis, Dublin City University.

Dobbyn, Kieran (2000) Design and application of a plasma impedance monitor for RF plasma diagnostics. Master of Science thesis, Dublin City University.

Conference or Workshop Item

Conway, Jim orcid logoORCID: 0000-0003-4282-2240, Gogna, Guru Sharan, Gaman, Cezar, Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 and Daniels, Stephen (2015) Two-photon absorption laser-induced fluorescence measurement of atomic oxygen density in an atmospheric pressure air plasma jet. In: 5th Radio Frequency Discharges Workshop, 22-23 Jun 2015, Dublin City University, Dublin, Ireland.

Ellingboe, Albert R. orcid logoORCID: 0000-0002-3997-0392 (2012) High-VHF Capacitive-Coupled-Plasma Technology, with Scaling to 450mm. In: SEMICON Korea, 2012, 7-9 Feb 2012, Seoul, South Korea.

Conway, Jim orcid logoORCID: 0000-0003-4282-2240, Kechkar, Samir, O'Connor, Noel E. orcid logoORCID: 0000-0002-4033-9135, Crowley, A., Gudimenko, E., Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 and Daniels, Stephen (2011) Application of two-photon absorption laser induced fluorescence to validate actinometry measurements of absolute atomic oxygen number density based on improved EEDFs obtained from PIC simulations. In: International Conference on Phenomena in Ionized Gases (ICPIG), 28 Aug - 2 Sept 2011, QUB, Belfast, UK.

This list was generated on Sat Dec 7 07:31:23 2024 UTC.