2019

Sharma, Sarveshwar ORCID: 0000-0002-0642-0247, Sirse, Nishant ORCID: 0000-0002-7063-4100, Sen, Abhijit, Turner, Miles M. ORCID: 0000-0001-9713-6198 and Ellingboe, Albert R. ORCID: 0000-0002-3997-0392 (2019) Influence of select discharge parameters on electric field transients triggered in collisionless very high frequency capacitive discharges. Physics of Plasmas, 26 (10). ISSN 1070-664X

2018

Sharma, Sarveshwar ORCID: 0000-0002-0642-0247, Sen, Abhijit, Sirse, Nishant ORCID: 0000-0002-7063-4100, Turner, Miles M. ORCID: 0000-0001-9713-6198 and Ellingboe, Albert R. ORCID: 0000-0002-3997-0392 (2018) Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge. Physics of Plasmas, 25 (8). ISSN 1070-664X

Sharma, Sarveshwar ORCID: 0000-0002-0642-0247, Sirse, Nishant ORCID: 0000-0002-7063-4100, Turner, Miles M. ORCID: 0000-0001-9713-6198 and Ellingboe, Albert R. ORCID: 0000-0002-3997-0392 (2018) Influence of driving frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge. Physics of Plasmas, 25 (6). ISSN 2331-8422

2016

Sharma, Sarveshwar ORCID: 0000-0002-0642-0247, Sirse, Nishant ORCID: 0000-0002-7063-4100, Kaw, P. K., Turner, Miles M. ORCID: 0000-0001-9713-6198 and Ellingboe, Albert R. ORCID: 0000-0002-3997-0392 (2016) Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasmas. Physics of Plasmas, 23 (11). ISSN 1089-7674

2012

Ellingboe, Albert R. ORCID: 0000-0002-3997-0392 (2012) High-VHF Capacitive-Coupled-Plasma Technology, with Scaling to 450mm. In: SEMICON Korea, 2012, 7-9 Feb 2012, Seoul, South Korea.

2011

Milosavljevic, Vladimir, Ellingboe, Albert R. ORCID: 0000-0002-3997-0392 and Daniels, Stephen (2011) Influence of plasma chemistry on oxygen triplets. European Physical Journal D. Atomic, Molecular, Optical and Plasma Physics. (64). pp. 437-445. ISSN 1434-6060 (In Press)