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Microchannel fabrication on cyclic olefin polymer substrates via 1064 nm Nd:YAG laser ablation

McCann, Ronán orcid logoORCID: 0000-0002-2071-0785, Bagga, Komal orcid logoORCID: 0000-0002-0464-6963, Groarke, Robert, Stalcup, Apryll orcid logoORCID: 0000-0003-1537-0437, Vázquez, Mercedes orcid logoORCID: 0000-0002-9770-5562 and Brabazon, Dermot orcid logoORCID: 0000-0003-3214-6381 (2016) Microchannel fabrication on cyclic olefin polymer substrates via 1064 nm Nd:YAG laser ablation. Applied Surface Science, 387 . pp. 603-608. ISSN 0169-4332

Abstract
This paper presents a method for fabrication of microchannels on cyclic olefin polymer films that have application in the field of microfluidics and chemical sensing. Continuous microchannels were fabricated on 188-μm-thick cyclic olefin polymer substrates using a picosecond pulsed 1064 nm Nd:YAG laser. The effect of laser fluence on the microchannel morphology and dimensions was analysed via scanning electron microscopy and optical profilometry. Single laser passes were found to produce v-shaped microchannels with depths ranging from 12 to 48 μm and widths from 44 to 154 μm. The ablation rate during processing was lower than predicted theoretically. Multiple laser passes were applied to examine the ability for finer control over microchannel morphology with channel depths ranging from 22 μm to 77 μm and channel widths from 59 μm to 155 μm. For up to five repeat passes, acceptable reproducibility was found in the produced microchannel morphology. Infrared spectroscopy revealed that the polymer surface chemistry was not significantly altered via the laser ablation process. These results were compared to other work conducted on cyclic olefin polymers.
Metadata
Item Type:Article (Published)
Refereed:Yes
Uncontrolled Keywords:Laser ablation; Cyclic olefin polymer; Microchannel fabrication; Nd:YAG; Picosecond; Microfluidics
Subjects:Engineering > Materials
Physical Sciences > Lasers
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Science and Health > School of Chemical Sciences
Research Institutes and Centres > Irish Separation Science Cluster (ISSC)
Research Institutes and Centres > National Centre for Plasma Science and Technology (NCPST)
Research Institutes and Centres > Advanced Processing Technology Research Centre (APTRC)
DCU Faculties and Schools > Faculty of Engineering and Computing > School of Mechanical and Manufacturing Engineering
Research Institutes and Centres > National Centre for Sensor Research (NCSR)
Publisher:Elsevier
Official URL:http://dx.doi.org/10.1016/j.apsusc.2016.06.059
Copyright Information:© 2016 Elsevier
Use License:This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License
Funders:Science Foundation Ireland, European Union's Horizon 2020 Research and Innovation Program
ID Code:21298
Deposited On:29 Jul 2016 10:23 by Ronan Mccann . Last Modified 17 Jun 2021 16:32
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