Chabert, Pascal and Turner, Miles M. ORCID: 0000-0001-9713-6198 (2017) A model for tailored-waveform radiofrequency sheaths. Journal of Physics D: Applied Physics, 50 (23). 23LT02. ISSN 0022-3727
Abstract
The sheath physics of radiofrequency plasmas excited by a sinusoidal waveform is reasonably well understood, but the existing models are complicated and are not easily extended to the more complex waveforms recently introduced in applications. Turner and Chabert (2014 Appl. Phys. Lett. 104 164102) proposed a model for collisionless sheaths that can easily be solved for arbitrary waveforms. In this paper we extend this model to the case of collisional sheaths in the intermediate pressure regime. Analytical expressions are derived for the electric field, the electric potential and the density profiles in the sheath region. The collisionless and collisional models are compared for a pulsed-voltage waveform.
Metadata
Item Type: | Article (Published) |
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Refereed: | Yes |
Uncontrolled Keywords: | low-temperature plasmas; sheaths; radio-frequency plasmas; capacitive discharges; tailored-waveform |
Subjects: | Physical Sciences > Plasmas Engineering > Microelectronics Physical Sciences > Plasma processing |
DCU Faculties and Centres: | Research Institutes and Centres > National Centre for Plasma Science and Technology (NCPST) DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences |
Publisher: | Institute of Physics |
Official URL: | https://doi.org/10.1088/1361-6463/aa6e42 |
Copyright Information: | © 2017 IOP Publishing Ltd |
Use License: | This item is licensed under a Creative Commons Attribution-NonCommercial-Share Alike 3.0 License. View License |
ID Code: | 21812 |
Deposited On: | 19 May 2017 14:44 by Miles Turner . Last Modified 24 Jan 2019 11:44 |
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