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Plasma asymmetry and electron and ion energy distribution function in capacitive discharges excited by tailored waveforms

Sharma, Sarveshwar orcid logoORCID: 0000-0002-0642-0247, Sirse, Nishant orcid logoORCID: 0000-0002-7063-4100, Kuley, Animesh orcid logoORCID: 0000-0003-2325-6597 and Turner, Miles M. orcid logoORCID: 0000-0001-9713-6198 (2021) Plasma asymmetry and electron and ion energy distribution function in capacitive discharges excited by tailored waveforms. Journal of Physics D: Applied Physics, 55 (27). pp. 1-24. ISSN 1361-6463

Abstract
Using particle-in-cell simulation technique, we investigate the plasma and ionization asymmetry, higher harmonics generation, electron and ion energy distribution function in capacitive discharges excited by tailored waveforms. At a base frequency of 13.56 MHz, three different waveforms namely, sinusoidal, saw-tooth, and square are applied for a constant current density amplitude of 50 A/m2 and gas pressure of 5 mTorr. The simulation results show that the square waveform produces highest plasma density in the discharge, whereas maximum asymmetry is observed for plasma excited by sawtooth like waveform. Both square and sawtooth waveforms generate multiple beams of high-energy electrons from near to the expanding phase of the sheath edge and high-frequency modulations up to 100 MHz on the instantaneous sheath position. The electron energy distribution function depicts 3 electron temperature and highly elevated tail-end electrons for the square waveform in comparison to the sinusoidal and sawtooth waveform. The ion energy distribution function is bimodal at both powered and grounded electrodes with a large asymmetry and narrow type distribution in the case of sawtooth like waveform. These results suggest that the choice of the waveform is highly critical for achieving maximum asymmetry and plasma density simultaneously in the discharge.
Metadata
Item Type:Article (Published)
Refereed:Yes
Subjects:Computer Science > Computer simulation
Physical Sciences > Plasma processing
Physical Sciences > Plasmas
DCU Faculties and Centres:DCU Faculties and Schools > Faculty of Science and Health > School of Physical Sciences
Research Institutes and Centres > National Centre for Plasma Science and Technology (NCPST)
Publisher:Institute of Physics Publishing Ltd.
Official URL:https://iopscience.iop.org/article/10.1088/1361-64...
Funders:Board of Research in Nuclear Sciences (BRNS Sanctioned No. 39/14/05/2018-BRNS),, Science and Engineering Research Board EMEQ program (SERB Sanctioned No. EEQ/2017/000164), National Supercomputing Mission (NSM) (Ref. No.: DST/NSM/R&D_HPC_Applications/2021/04), Infosys Foundation Young Investigator grant.
ID Code:29980
Deposited On:16 May 2024 14:57 by Miles Turner . Last Modified 16 May 2024 14:57
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